EFFECTS OF HIGH-TEMPERATURE ANNEALING ON MNOS DEVICES

被引：19

作者：

TOPICH, JA ^{[1
]}

YON, ET ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,CTR ENGN DESIGN,CLEVELAND,OH 44106

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 04期

关键词：

D O I：

10.1149/1.2132872

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：535 / 539

页数：5

共 20 条

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TAYLOR, HL .

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[20] CONDUCTION PROPERTIES OF PYROLYTIC SILICON NITRIDE FILMS [J].

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TAYLOR, HL .

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