MATERIALS SURFACE MODIFICATION BY PLASMA BOMBARDMENT UNDER SIMULTANEOUS EROSION AND REDEPOSITION CONDITIONS

被引：18

作者：

HIROOKA, Y

GOEBEL, DM

CONN, RW

CAMPBELL, GA

LEUNG, WK

WILSON, KL

BAUER, W

CAUSEY, RA

MORSE, DH

BOHDANSKY, J

机构：

[1] SANDIA NATL LABS,DIV PHYS RES,LIVERMORE,CA 94550

[2] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 23卷 / 04期

关键词：

D O I：

10.1016/0168-583X(87)90471-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：458 / 470

页数：13

共 29 条

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