VALIDITY OF A BOLTZMANN-EQUATION METHOD FOR PREDICTING EFFECT OF IONIZATION AND ATTACHMENT

被引：38

作者：

TANIGUCHI, T ^{[1
]}

TAGASHIRA, H ^{[1
]}

SAKAI, Y ^{[1
]}

机构：

[1] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1977年 / 10卷 / 16期

关键词：

D O I：

10.1088/0022-3727/10/16/020

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2301 / 2306

页数：6

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