FILM DEPOSITION AND BURIED LAYER FORMATION BY MASS-ANALYZED ION-BEAMS

被引：14

作者：

YAMADA, I

INOKAWA, H

TAKAGI, T

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90671-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：439 / 446

页数：8

共 11 条

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CHABOT, R .

[3]

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BUCKLEY, WD ;

MOSS, SC .

[5]

CHOPRA KL, 1969, THIN FILM PHENOMENA, P345

FONTELL, A ;

ARMINEN, E .

[7]

GIBBONS JF, 1975, PROJECTED RANGE STAT

[8] PERCOLATION AND CONDUCTION [J].

KIRKPATRICK, S .

[9]

LIAU ZL, 1980, TREATISE MATERIALS S, V18, P17

[10]

MURT EM, 1969, PHYSICAL MEASUREMENT, P110