GROWTH OF FE AND FEAS2 FILMS ON GAAS BY ORGANOMETAL CHEMICAL VAPOR-DEPOSITION USING PENTACARBONYL IRON AND ARSINE

被引:10
作者
WALSH, PJ [1 ]
BOTTKA, N [1 ]
机构
[1] USN,RES LAB,WASHINGTON,DC 20375
关键词
D O I
10.1149/1.2115601
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:444 / 446
页数:3
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