X-RAY-DIFFRACTION STUDY OF TEXTURE AND GROWTH OF RF-SPUTTERED CDS FILMS

被引：20

作者：

BENNOUNA, A ^{[1
]}

AMEZIANE, EL ^{[1
]}

HAOUNI, A ^{[1
]}

GHERMANI, N ^{[1
]}

AZIZAN, M ^{[1
]}

BRUNEL, M ^{[1
]}

机构：

[1] LAB CRISTALLOG GRENOBLE, F-38042 GRENOBLE, FRANCE

来源：

SOLAR ENERGY MATERIALS | 1990年 / 20卷 / 5-6期

关键词：

D O I：

10.1016/0165-1633(90)90032-V

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

The growth and the texture of RF-sputtered cadmium sulfide thin films are investigated using the X-ray diffraction technique. The results show that: (1) the film quality is very sensitive to the argon pressure in the deposition chamber, (2) heating the substrate at 200°C enhances the degree of preferential orientation, and (3) higher substrate temperatures increase the stacking fault density in the grains. The sizes of crystallites are estimated from the reflection widths, and an analytical model for grain orientation is proposed. © 1990.

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页码：405 / 415

页数：11

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