A COMPARISON OF TECHNIQUES FOR NONDESTRUCTIVE COMPOSITION MEASUREMENTS IN CDZNTE SUBSTRATES

被引：51

作者：

TOBIN, SP

TOWER, JP

NORTON, PW

CHANDLERHOROWITZ, D

AMIRTHARAJ, PM

LOPES, VC

DUNCAN, WM

SYLLAIOS, AJ

ARD, CK

GILES, NC

LEE, J

BALASUBRAMANIAN, R

BOLLONG, AB

STEINER, TW

THEWALT, MLW

BOWEN, DK

TANNER, BK

机构：

[1] NIST,GAITHERSBURG,MD 20899

[2] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

[3] II VI INC,SAXONBURG,PA 16056

[4] W VIRGINIA UNIV,MORGANTOWN,WV 26506

[5] JOHNSON MATTHEY ELECTR,SPOKANE,WA 99216

[6] SIMON FRASER UNIV,BURNABY,BC V5A 1S6,CANADA

[7] UNIV WARWICK,COVENTRY CV4 7AL,W MIDLANDS,ENGLAND

[8] UNIV DURHAM,DURHAM DH3 1LE,ENGLAND

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1995年 / 24卷 / 05期

关键词：

CDZNTE; HGCDTE; LATTICE CONSTANT; NONDESTRUCTIVE MEASUREMENTS; PHOTOLUMINESCENCE; PHOTOREFLECTANCE;

D O I：

10.1007/BF02657981

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report an overview and a comparison of nondestructive optical techniques for determining alloy composition x in Cd1-xZnxTe substrates for HgCdTe epitaxy. The methods for single-point measurements include a new x-ray diffraction technique for precision lattice parameter measurements using a standard high-resolution diffractometer, room-temperature photoreflectance, and low-temperature photoluminescence. We compare measurements on the same set of samples by all three techniques. Comparisons of precision and accuracy, with a discussion of the strengths and weaknesses of different techniques, are presented. In addition, a new photoluminescence excitation technique for full-wafer imaging of composition variations is described.

引用

页码：697 / 705

页数：9

共 11 条

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