MEDIUM-ENERGY BACKSCATTERED ELECTRON-DIFFRACTION AS A PROBE OF ELASTIC STRAIN IN EPITAXIAL OVERLAYERS

被引：23

作者：

CHAMBERS, SA

VITOMIROV, IM

ANDERSON, SB

WEAVER, JH

机构：

[1] BOEING CO,CTR ELECTR HIGH TECHNOL,BOX 24969,MS9Z80,SEATTLE,WA 98124

[2] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.35.2490

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2490 / 2493

页数：4

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