A THEORETICAL-STUDY OF TRANSDUCER NOISE IN PIEZORESISTIVE AND CAPACITIVE SILICON PRESSURE SENSORS

被引：31

作者：

SPENCER, RR ^{[1
]}

FLEISCHER, BM ^{[1
]}

BARTH, PW ^{[1
]}

ANGELL, JB ^{[1
]}

机构：

[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 08期

关键词：

Manuscript received November 18; 1987; revised April 5; 1988. This work was supported by the Ford Motor Corporation; the Stanford University Solid-state Industrial Affiliates Program; and the NSF under Grant ECS-8710320. B. M. Fleischer was supported by a Bell Laboratories Fellowship. R. R. Spencer was with the Integrated Circuits Laboratory; Stanford University; Stanford; CA 94305. He is now with the Department of Electrical Engineering and Computer Science; University of California; Davis; CA 95616. B. M. Fleischer and J. B. Angel1 are with the Integrated Circuits Laboratory; CA 94305. P. W. Barth was with the Integrated Circuits Laboratory; CA 94305. He is now with NovaSensor; Fremont; CA 94539. IEEE Log Number 8822120;

D O I：

10.1109/16.2550

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1289 / 1298

页数：10

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