UV LASER INCORPORATION OF DOPANTS INTO SILICON - COMPARISON OF 2 PROCESSES

[1] APPLETON BR, 1982, LASER ELECTRON BEAM

[2] AUSTON DH, 1979, LASER SOLID INTERACT, P11

[3] FAN JCC, 1984, ENERGY BEAM SOLID IN

[4] FERRIS SD, 1979, LASER SOLID INTERACT

[5] A MODEL FOR LASER-INDUCED DIFFUSION [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) : 5059 - 5063

[6] FOGARASSY E, 1980, LASER ELECTRON BEAM, P117

[7] Hill C., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P361

[8] STABILITY OF PLANAR INTERFACE DURING SOLIDIFICATION OF DILUTE BINARY ALLOY [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) : 444 - &

[9] INTERFACE INSTABILITY AND CELL-FORMATION IN ION-IMPLANTED AND LASER-ANNEALED SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) : 1289 - 1293

[10] NARAYAN J, 1983, LASER SOLID INTERACT

[1] APPLETON BR, 1982, LASER ELECTRON BEAM

[2] AUSTON DH, 1979, LASER SOLID INTERACT, P11

[3] FAN JCC, 1984, ENERGY BEAM SOLID IN

[4] FERRIS SD, 1979, LASER SOLID INTERACT

[5] A MODEL FOR LASER-INDUCED DIFFUSION [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) : 5059 - 5063

[6] FOGARASSY E, 1980, LASER ELECTRON BEAM, P117

[7] Hill C., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P361

[8] STABILITY OF PLANAR INTERFACE DURING SOLIDIFICATION OF DILUTE BINARY ALLOY [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) : 444 - &

[9] INTERFACE INSTABILITY AND CELL-FORMATION IN ION-IMPLANTED AND LASER-ANNEALED SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) : 1289 - 1293

[10] NARAYAN J, 1983, LASER SOLID INTERACT