INTERFEROMETRIC POLARIZATION PICOMETRIC PROFILE .1. SINGLE DETECTOR APPROACH

被引:17
作者
GLEYZES, P
BOCCARA, AC
机构
来源
JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1994年 / 25卷 / 05期
关键词
PROFILOMETER; POLARIZATION MICROSCOPE; ROUGHNESS;
D O I
10.1088/0150-536X/25/5/005
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe in this first part an interferometric polarization microscope coupled with a photoelastic modulator. This simple and compact setup, which can be installed on a commercial microscope, exhibits a sensitivity in the picometric range and uses a sample scanning.
引用
收藏
页码:207 / 224
页数:18
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