LIQUID-CRYSTAL INTEGRATED SILICON SPATIAL LIGHT-MODULATOR

被引：10

作者：

ARMITAGE, D

KINELL, DK

机构：

[1] Research and Development Division, Lockheed Missiles and Space Company, Inc., Palo Alto, CA

来源：

APPLIED OPTICS | 1992年 / 31卷 / 20期

关键词：

SPATIAL LIGHT MODULATOR; LIQUID CRYSTAL; ACTIVE-MATRIX ADDRESSING;

D O I：

10.1364/AO.31.003945

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The integration issues regarding liquid crystals and silicon-chip technology are discussed. A 12 x 12 active-matrix array is fabricated in silicon and addresses a ferroelectric liquid crystal. The structure and performance of the resulting electronically addressed spatial light modulator are reported.

引用

页码：3945 / 3949

页数：5

共 21 条

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[2]

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[10]

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