INFLUENCE OF SPUTTERING OF THE FILMS ON COMPOUND FORMATION IN FILM FILM AND BULK FILM SYSTEMS

被引：7

作者：

SIMIC, V

MARINKOVIC, Z

机构：

来源：

JOURNAL OF THE LESS-COMMON METALS | 1985年 / 106卷 / 02期

关键词：

D O I：

10.1016/0022-5088(85)90265-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：287 / 292

页数：6

共 9 条

[1]

ARONSON A, 1983, 32ND P SPUTT SCH TUR

[2]

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[3] SURFACE-TEMPERATURE MEASUREMENTS DURING THIN-FILM DEPOSITION BY RF SPUTTERING [J].

MISIANO, C ;

SIMONETTI, E ;

CORSI, C .

THIN SOLID FILMS, 1975, 27 (02) :L15-L17

[4] ROOM-TEMPERATURE INTERACTIONS IN COPPER-METAL THIN-FILM COUPLES [J].

SIMIC, V ;

MARINKOVIC, Z .

JOURNAL OF THE LESS-COMMON METALS, 1980, 72 (01) :133-140

[5] ROOM-TEMPERATURE INTERACTIONS IN AG-METALS THIN-FILM COUPLES [J].

SIMIC, V ;

MARINKOVIC, Z .

THIN SOLID FILMS, 1979, 61 (02) :149-160

[6] THIN-FILM INTERDIFFUSION OF AU AND GA AT ROOM-TEMPERATURE [J].

SIMIC, V ;

MARINKOVIC, Z .

THIN SOLID FILMS, 1976, 34 (01) :179-183

[7] POSSIBILITY OF AND CONDITIONS FOR THE ROOM-TEMPERATURE FORMATION OF COMPOUNDS AT THE BULK METAL THIN METAL-FILM INTERFACE [J].

SIMIC, V ;

MARINKOVIC, Z .

JOURNAL OF THE LESS-COMMON METALS, 1983, 95 (02) :259-265

[8]

SMITHELLS CJ, 1976, METALS REFERENCE BOO, V1, P328

[9]

1979, ASTM CARD INDEX

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