FILM GROWTH OF BEO USING R-ICB TECHNIQUE AND APPLICATIONS TO ELECTRONIC THIN-FILM DEVICES

被引：4

作者：

MATSUBARA, K

YAMADA, I

TAKAOKA, H

TAKAGI, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1982年 / 21卷 / 01期

关键词：

D O I：

10.7567/JJAPS.21S1.403

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：403 / 408

页数：6

共 16 条

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