TRANSDUCTION MECHANISMS IN SAW GAS SENSORS

被引：21

作者：

NIEUWENHUIZEN, MS ^{[1
]}

BARENDSZ, AW ^{[1
]}

NIEUWKOOP, E ^{[1
]}

VELLEKOOP, MJ ^{[1
]}

VENEMA, A ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT ELECT ENGN,2628 CD DELFT,NETHERLANDS

来源：

ELECTRONICS LETTERS | 1986年 / 22卷 / 04期

关键词：

GASES; -; SENSORS; Performance;

D O I：

10.1049/el:19860128

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Experimental results are presented for a surface-acoustic-wave gas sensor. At 150 degree C a pronounced selectivity towards NO//2 was observed. The transduction of a chemical signal concentration into a physical signal (SAW phase velocity) is discussed in terms of the effect of mass and conductivity changes on sensor response.

引用

页码：184 / 185

页数：2

共 7 条

[1] BARENDSZ AW, 1985, P IEEE ULTRASONICS S
[2] SURFACE WAVES IN PIEZOELECTRICS
INGEBRIGTSEN, KA
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) : 2681 - +
[3] MARTIN SJ, 1985, P INT C SOLID STATE, P71
[4] VANOIRSCHOT TG, 1972, ELECTROANAL CHEM INT, V37, P373
[5] CALCULATIONS OF DELTA-V/V FOR THIN-FILM SAW TRANSDUCERS ON A NONZERO CONDUCTIVE SILICON SUBSTRATE
VENEMA, A
HUMPHRYES, RF
DEKKERS, JJM
[J]. ELECTRONICS LETTERS, 1977, 13 (21) : 647 - 649
[6] VENEMA AA, 1980, THESIS DELFT U TECHN
[7] WOHLTJEN H, 1985, P INT C SOLD STATE S, P66

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