NEW ANALYTICAL TECHNIQUE FOR CHARACTERIZATION OF THIN-FILMS USING SURFACE-PLASMON RESONANCE

被引:63
作者
JOHNSTON, KS
KARLSEN, SR
JUNG, CC
YEE, SS
机构
[1] Department of Electrical Engineering, University of Washington, Seattle, WA 98195-2500
关键词
FILMS; SURFACE PLASMON RESONANCE;
D O I
10.1016/0254-0584(95)01659-I
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A theoretical technique is presented for simultaneously determining the thickness and dispersive refractive index of a homogeneous thin film applied to a surface plasmon resonance sensor. The technique has the potential for real-time characterization of film parameters while immersed in air, vacuum or liquid media. Experimental realization requires a calibrated wavelength-modulated surface plasmon resonance sensor that is measured at several angles of illumination. A fine-tuned numerical model is used to generate general solutions that describe the sensor response for each angle of illumination. A differential technique and an assumption of a linear dispersion are used to produce a unique solution for the thickness and dispersive refractive index of the film. For a simulated 183 nm thick glass film, results shows 1% thickness prediction error and refractive index prediction error on the order of 3 X 10(-3).
引用
收藏
页码:242 / 246
页数:5
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