OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY HIGH-RATE SPUTTERING

被引：14

作者：

HATA, T

TORIYAMA, K

KAWAHARA, J

OZAKI, M

机构：

来源：

THIN SOLID FILMS | 1983年 / 108卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90081-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：325 / 332

页数：8

共 15 条

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[8]

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[9]

MINAKATA M, 1973, US7337 TECH REP, P25

[10] CHARGE INJECTION IN METAL-ZNO-SIO2-SI STRUCTURES [J].

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