COMPLEX HETEROGENEOUS EQUILIBRIA IN VAPOR-PHASE CRYSTAL-GROWTH SYSTEMS

被引:7
作者
DONLEY, M
RAO, YK
机构
关键词
D O I
10.1016/0022-0248(82)90236-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:273 / 278
页数:6
相关论文
共 8 条
[1]   INCORPORATION OF PHOSPHORUS IN SILICON EPITAXIAL LAYER GROWTH [J].
BLOEM, J ;
GILING, LJ ;
GRAEF, MWM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (10) :1354-1357
[2]  
DARKEN LS, 1953, PHYSICAL CHEM METALS
[3]  
Gaskell D.R, 1981, INTRO METALLURGICAL, Vsecond, P421
[4]  
Gokcen, 1975, THERMODYNAMICS
[5]  
RAO YK, UNPUB J CRYSTAL GROW
[6]  
WALL FT, 1974, CHEM THERMODYNAMICS
[8]  
1971, JANAF THERMOCHEMICAL