DETECTION LIMITS IN ELEMENTAL DISTRIBUTION IMAGES PRODUCED BY ENERGY-FILTERING TEM - CASE-STUDY OF GRAIN-BOUNDARIES IN SI3N4

被引：63

作者：

BERGER, A

MAYER, J

KOHL, H

机构：

[1] MAX PLANCK INST MET RES,INST WERKSTOFFWISSENSCH,D-70174 STUTTGART,GERMANY

[2] UNIV MUNSTER,INST PHYS,D-48149 MUNSTER,GERMANY

来源：

ULTRAMICROSCOPY | 1994年 / 55卷 / 01期

关键词：

D O I：

10.1016/0304-3991(94)90084-1

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Using an energy filtering transmission electron microscope (EFTEM) we have investigated the detection limits of elemental distribution images obtained by electron spectroscopic imaging (ESI). As a model system we have chosen the amorphous grain boundary films in sintered Si3N4 ceramics. The analyzed films consist of SiO2 with a thickness between 0.7 and 1.5 nm corresponding roughly to 2-5 monolayers of oxygen. The experimental results are compared with theoretical predictions. Imaging conditions yielding optimum detectability are determined. The detection limit is discussed quantitatively.

引用

页码：101 / 112

页数：12

共 22 条

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