THERMODYNAMIC ANALYSIS OF THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND FILMS

被引:43
作者
SOMMER, M
MUI, K
SMITH, FW
机构
关键词
D O I
10.1016/0038-1098(89)90829-6
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
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页码:775 / 778
页数:4
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