STRUCTURE-ANALYSIS OF SPUTTER-COATED AND ION-BEAM SPUTTER-COATED FILMS - A COMPARATIVE-STUDY

被引:30
作者
KEMMENOE, BH
BULLOCK, GR
机构
来源
JOURNAL OF MICROSCOPY-OXFORD | 1983年 / 132卷 / NOV期
关键词
D O I
10.1111/j.1365-2818.1983.tb04267.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
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页码:153 / 163
页数:11
相关论文
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