DIAMOND SYNTHESIS FROM VAPOR-PHASE AND ITS GROWTH-PROCESS

被引:68
作者
SETAKA, N
机构
[1] Natl Inst for Research in Inorganic, Materials, Japan
关键词
Crystals--Growth;
D O I
10.1557/JMR.1989.0664
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond synthesis from the vapor phase has been studied using hot filament assisted CVD, microwave plasma assisted CVD in an open system, and chemical transport process in a closed system using a gas mixture of hydrocarbon diluted with hydrogen gas. The deposited materials were identified as a cubic diamond with x-ray diffraction and Raman scattering measurement. The deposition process of diamond was considered on the basis of these experimental results. The results suggest that the diamond synthesis proceeded by the deposition process, with the etching process operating simultaneously, and that atomic hydrogen played a very important role as the etching agent for non-diamond carbon. Also, the deposition process would be considered as the method that utilizes the bonding energy difference on each crystal surface of the diamond. The complicated problems on diamond synthesis originate from the fact that a third allotropic form exists in carbon, that is, the carbyne group.
引用
收藏
页码:664 / 670
页数:7
相关论文
共 21 条
  • [1] ANGUS JC, 1968, J APPL PHYS, V2, P380
  • [2] GRAPHITIZATION OF DIAMOND AT ZERO PRESSURE AND AT A HIGH-PRESSURE
    DAVIES, G
    EVANS, T
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1972, 328 (1574): : 413 - &
  • [3] Derjaguin B. V., 1968, Journal of Crystal Growth, V2, P380, DOI 10.1016/0022-0248(68)90033-X
  • [4] Derjaguin BV., 1977, GROWTH DIAMOND GRAPH
  • [5] Eversole W. G., 1962, US Patent, Patent No. [3,030,187, 3030187]
  • [6] Eversole W. G., 1962, US Patent, Patent No. [3,030,188, 3030188]
  • [7] DISSOCIATION AND IONIZATION OF HYDROGEN IN HIGH FREQUENCY DISCHARGES
    GOODYEAR, CC
    VONENGEL, A
    [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (510): : 732 - &
  • [8] A UNIFIED STRUCTURAL APPROACH TO LINEAR CARBON POLYTYPES
    HEIMANN, RB
    KLEIMAN, J
    SALANSKY, NM
    [J]. NATURE, 1983, 306 (5939) : 164 - 167
  • [9] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
    KAMO, M
    SATO, Y
    MATSUMOTO, S
    SETAKA, N
    [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
  • [10] REACTION KINETICS OF HYDROGEN ATOMS WITH CARBON FILMS
    KING, AB
    WISE, H
    [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (06) : 1163 - &