MORPHOLOGICAL AND ELECTRICAL PROPERTIES OF RF SPUTTERED Y2O3-DOPED ZRO2 THIN-FILMS

被引：32

作者：

GREENE, JE

WICKERSHAM, CE

ZILKO, JL

WELSH, LB

SZOFRAN, FR

机构：

[1] UNIV ILLINOIS,URBANA,IL 61801

[2] UNIVERSAL OIL PROD INC,DES PLAINES,IL 60016

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568960

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：72 / 75

页数：4

共 8 条

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[4]

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[5]

MATTOX DM, 1974, 6TH P INT VAC C KYOT

[6]

MATTOX DM, 1965, SCR65852 SAND LAB RE

[7] IONIC AND ELECTRONIC CONDUCTIVITY IN Y2O3-DOPED MONOCLINIC ZRO2 [J].

NASRALLAH, MM ;

DOUGLASS, DL .

[8]

PATTERSON J, 1972, PHYSICS ELECTRONIC C, P131