LASER-INDUCED FLUORESCENCE SPECTROSCOPY FOR THE DETERMINATION OF THE ABSOLUTE DENSITY AND SPATIAL-DISTRIBUTION OF SI ATOMS IN A SIH4-HE-AR GLOW-DISCHARGE

被引：20

作者：

TAKUBO, Y

TAKASUGI, Y

YAMAMOTO, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.342476

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1050 / 1054

页数：5

共 17 条

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