THE FUTURE OF MICROSTRUCTURE TECHNOLOGY - THE INDUSTRY VIEW

被引:4
作者
BATE, RT
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D O I
10.1016/0749-6036(86)90146-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
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页码:9 / 11
页数:3
相关论文
共 8 条
[1]  
BATE RT, UNPUB VLSI HDB, pCH35
[2]  
BATE RT, 1984 DEV RES C SANT
[3]  
BATE RT, 1983, 4TH WORKSH PHYS SUBM
[4]   MODELING OF SMALL MOS DEVICES AND DEVICE LIMITS [J].
CHATTERJEE, PK ;
YANG, P ;
SHICHIJO, H .
IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1983, 130 (03) :105-126
[5]  
HEILMEIER GH, 1984 P IEDM, P2
[6]  
MEINDL JD, 1983 P IEDM, P8
[7]  
MORTON JA, 1965, IEEE SPECTRUM, P62
[8]  
UNPUB ARTIFICIALLY S