HIGH-RATE SPUTTERING OF NB-AL-GE AND NB-AL SUPERCONDUCTORS

被引:12
作者
DAHLGREN, SD [1 ]
机构
[1] BATTELLE MEM INST,RICHLAND,WA 99352
关键词
D O I
10.1109/TMAG.1975.1058639
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:217 / 220
页数:4
相关论文
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