OPTICAL WAVE-GUIDE MICROSCOPY

被引:32
作者
HICKEL, W [1 ]
KNOLL, W [1 ]
机构
[1] MAX PLANCK INST POLYMER RES,W-6500 MAINZ,GERMANY
关键词
D O I
10.1063/1.103461
中图分类号
O59 [应用物理学];
学科分类号
摘要
Optical waveguide microscopy is introduced as a novel imaging technique that allows for the microscopic characterization of thin-film samples by using guided optical waves as illumination light source. Excellent thickness (<1 nm) and good lateral resolution (<10 μm) is demonstrated. As a first application we image and analyze the two-dimensional thickness profile of a planar polymeric spun-on waveguide structure.
引用
收藏
页码:1286 / 1288
页数:3
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