OPTICAL WAVE-GUIDE MICROSCOPY

被引：32

作者：

HICKEL, W ^{[1
]}

KNOLL, W ^{[1
]}

机构：

[1] MAX PLANCK INST POLYMER RES,W-6500 MAINZ,GERMANY

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 13期

关键词：

D O I：

10.1063/1.103461

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Optical waveguide microscopy is introduced as a novel imaging technique that allows for the microscopic characterization of thin-film samples by using guided optical waves as illumination light source. Excellent thickness (<1 nm) and good lateral resolution (<10 μm) is demonstrated. As a first application we image and analyze the two-dimensional thickness profile of a planar polymeric spun-on waveguide structure.

引用

页码：1286 / 1288

页数：3

共 11 条

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