EFFICIENT ZONE PLATE ARRAY ACCESSOR FOR OPTOELECTRONIC INTEGRATED-CIRCUITS - DESIGN AND FABRICATION

被引:18
作者
KODATE, K [1 ]
TOKUNAGA, E [1 ]
TATUNO, Y [1 ]
CHEN, JL [1 ]
KAMIYA, T [1 ]
机构
[1] UNIV TOKYO,DEPT ELECTR ENGN,TOKYO 113,JAPAN
来源
APPLIED OPTICS | 1990年 / 29卷 / 34期
关键词
Beam splitter; Zone plate array;
D O I
10.1364/AO.29.005115
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A spatially divided beam splitter is designed, by which the laser diode light couples into multiple fibers using a cylindrical lens and a phase type linear zone plate array. Using skew ray tracing, the focusing characteristics of a spatially divided beam splitter are predicted. A three-section linear zone plate array with the linewidth changing from 1.1 to 2.05 μm was fabricated by holographic mask patterning and deep UV printing. In oblique incident conditions close to the Bragg angle, the diffraction efficiency reached 60%. By combining the linear zone plate array with a cylindrical lens, simultaneous focusing and separation of the laser output are achieved. © 1990 Optical Society of America.
引用
收藏
页码:5115 / 5119
页数:5
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