MODIFICATION OF DOPANT PROFILES DUE TO SURFACE AND INTERFACE INTERACTIONS - APPLICATIONS TO SEMICONDUCTOR-MATERIALS

被引：6

作者：

JAGANNADHAM, K

NARAYAN, J

机构：

来源：

关键词：

D O I：

10.1063/1.338152

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：985 / 992

页数：8

共 19 条

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