FABRICATION OF A15 NB3AL JOSEPHSON TUNNEL JUNCTION USING CF4 CLEANING PROCESS

被引：4

作者：

KATOH, Y

TANABE, K

MICHIKAMI, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 07期

关键词：

D O I：

10.1143/JJAP.22.L464

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L464 / L466

页数：3

共 13 条

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