DIFFERENCES BETWEEN MICROWAVE AND RF ACTIVATION OF NITROGEN FOR THE PECVD PROCESS

被引：16

作者：

BARDOS, L

MUSIL, J

TARAS, P

机构：

来源：

关键词：

D O I：

10.1088/0022-3727/15/7/006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L79 / L82

页数：4

共 8 条

[1] VIBRATIONAL TEMPERATURES OF PULSE-EXCITED TORCH DISCHARGE
JANCA, J
[J]. CZECHOSLOVAK JOURNAL OF PHYSICS, 1965, 15 (09) : 662 - &
[2] ACTIVE NITROGEN
MANNELLA, GG
[J]. CHEMICAL REVIEWS, 1963, 63 (01) : 1 - &
[3] MOISAN M, 1976, IEE C PUBL, V143, P382
[4] MOISAN M, 1982, UNPUB PROPERTIES APP
[5] SECRIST DR, 1966, B AM CERAM SOC, V45, P784
[6] SHIBAGAKI M, 1977, OCT P EL SOC FALL M
[7] PREPARATION OF NITRIDES BY ACTIVE NITROGEN .2. SI3N4
SHILOH, M
GAYER, B
BRINCKMAN, FE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) : 295 - 300
[8] Wright A N, 1968, ACTIVE NITROGEN