ROUGHNESS IN SI1-XGEX/SI SUPERLATTICES - GROWTH TEMPERATURE-DEPENDENCE

被引：9

作者：

HEADRICK, RL

BARIBEAU, JM

机构：

[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853

[2] NATL RES COUNCIL CANADA,INST MICROSTRUCT SCI,OTTAWA,ON K1A 0R6,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579827

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：782 / 786

页数：5

共 18 条

[1] UTILIZATION OF SPECULAR X-RAY REFLECTION, DIFFUSE X-RAY REFLECTION OR PLANAR X-RAY REFLECTION TO STUDY THIN-FILMS OR SURFACES [J].

CROCE, P ;

NEVOT, L .

REVUE DE PHYSIQUE APPLIQUEE, 1976, 11 (01) :113-125

[2] MECHANICALLY AND THERMALLY STABLE SI-GE FILMS AND HETEROJUNCTION BIPOLAR-TRANSISTORS GROWN BY RAPID THERMAL CHEMICAL VAPOR-DEPOSITION AT 900-DEGREES-C [J].

GREEN, ML ;

WEIR, BE ;

BRASEN, D ;

HSIEH, YF ;

HIGASHI, G ;

FEYGENSON, A ;

FELDMAN, LC ;

HEADRICK, RL .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :745-757

[3] CORRELATED ROUGHNESS IN (GE(M)/SI(N))P SUPERLATTICES ON SI(100) [J].

HEADRICK, RL ;

BARIBEAU, JM .

PHYSICAL REVIEW B, 1993, 48 (12) :9174-9177

[4]

HEADRICK RL, 1994, APPL PHYS LETT, V66, P96

[5] DIRECT IMAGING OF SURFACE CUSP EVOLUTION DURING STRAINED-LAYER EPITAXY AND IMPLICATIONS FOR STRAIN RELAXATION [J].

JESSON, DE ;

PENNYCOOK, SJ ;

BARIBEAU, JM ;

HOUGHTON, DC .

PHYSICAL REVIEW LETTERS, 1993, 71 (11) :1744-1747

[6] STRAIN RELAXATION AND ORDERING IN SIGE LAYERS GROWN ON (100), (111), AND (110) SI SURFACES BY MOLECULAR-BEAM EPITAXY [J].

KUAN, TS ;

IYER, SS .

APPLIED PHYSICS LETTERS, 1991, 59 (18) :2242-2244

[7] INTERFACIAL MICROSTRUCTURES OF ULTRATHIN GE LAYERS ON SI PROBED BY X-RAY-SCATTERING AND FLUORESCENCE YIELD [J].

MING, ZH ;

SOO, YL ;

HUANG, S ;

KAO, YH ;

TSANG, JC ;

IYER, SS .

APPLIED PHYSICS LETTERS, 1994, 65 (11) :1382-1384

[8] CHARACTERIZATION OF LATERAL CORRELATION LENGTH OF INTERFACE ROUGHNESS IN MBE GROWN GAAS/ALAS QUANTUM-WELLS BY MOBILITY MEASUREMENT [J].

NODA, T ;

TANAKA, M ;

SAKAKI, H .

JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :348-352

[9] SURFACE STUDIES OF SOLIDS BY TOTAL REFLECTION OF X-RAYS [J].

PARRATT, LG .

PHYSICAL REVIEW, 1954, 95 (02) :359-369

[10] X-RAY-DIFFRACTION MEASUREMENT OF PARTIALLY CORRELATED INTERFACIAL ROUGHNESS IN MULTILAYERS [J].

PHANG, YH ;

SAVAGE, DE ;

KARIOTIS, R ;

LAGALLY, MG .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (05) :3181-3188

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