A NEW METHOD FOR DETERMINING THE THICKNESS AND COMPOSITION OF THIN-LAYERS BY ELECTRON-PROBE MICROANALYSIS

被引：15

作者：

HUNGER, HJ ^{[1
]}

BAUMANN, W ^{[1
]}

SCHULZE, S ^{[1
]}

机构：

[1] TH KARL MARX STADT,SEKT PHYS,PSF 964,DDR-9010 KARL MARX STADT,GER DEM REP

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1985年 / 20卷 / 11期

关键词：

D O I：

10.1002/crat.2170201102

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：1427 / 1433

页数：7

共 12 条

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[2]

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[5]

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[8] SURFACE IONIZATION FUNCTION PHI-(O) DERIVED USING A MONTE-CARLO METHOD [J].

LOVE, G ;

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SCOTT, VD .

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[9] EVALUATION OF A NEW CORRECTION PROCEDURE FOR QUANTITATIVE ELECTRON-PROBE MICROANALYSIS [J].

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[10] ELECTRON BACKSCATTERING FROM THIN-FILMS [J].

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