VIDEO MICROSCOPE WITH SUBMICROMETER RESOLUTION

被引：7

作者：

MECHELS, S

YOUNG, M

机构：

[1] U.S. National Institute of Standards and Technology, Electromagnetic Technology Division, Boulder, CO, 80303

来源：

APPLIED OPTICS | 1991年 / 30卷 / 16期

关键词：

D O I：

10.1364/AO.30.002202

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have constructed and evaluated a video microscope with a 150- x 150-mu-m field of view for performing measurements of optical fiber geometry. The microscope consists of a frame transfer video camera, condensing and filtering optics, a 40X, 0.65 N.A. microscope objective, and frame digitizing electronics. Using simple digital algorithms, we measure distance with a random uncertainty of approximately 40 nm across the full field of view, but width measurements suffer from a systematic error between 0.1 and 0.2-mu-m.

引用

页码：2202 / 2211

页数：10

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