INFLUENCE OF THE DEPOSITION RATE ON THE RATIO OF A/C-AXIS ORIENTED GRAINS IN SPUTTERED YBACUO FILMS

被引：18

作者：

BURMANN, T

GEERK, J

MEYER, O

SCHNEIDER, R

LINKER, G

机构：

[1] Kernforschungszentrum Karlsruhe, Institut für Nukleare Festkörperphysik, D-76021 Karlsruhe

来源：

SOLID STATE COMMUNICATIONS | 1994年 / 90卷 / 09期

关键词：

D O I：

10.1016/0038-1098(94)90129-5

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

YBaCuO films with thicknesses in the range of 120-150 nm have been deposited by inverted cylindrical magnetron sputtering on (100) SrTiO3 substrates. The deposition rate in the experiments has been varied between 0.02 and 0.18 nm s-1. The influence of the rate on the ratio of a-axis to c-axis oriented material determined by X-ray diffraction has been investigated with the substrate temperature as a parameter. The results reveal the counteracting effects of high rate and high temperature on the occurrence of a-oriented material. A high rate enhances a-axis growth especially at low temperatures supporting the general rule that a reduction of the migration length on a growing surface favours a-axis against c-axis growth.

引用

页码：599 / 602

页数：4

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