MODEL DIFFRACTION PROFILES PARALLEL TO ROUGH STEP EDGES

被引:11
作者
KARIOTIS, R [1 ]
SWARTZENTRUBER, BS [1 ]
LAGALLY, MG [1 ]
机构
[1] UNIV WISCONSIN,DEPT PHYS,MADISON,WI 53706
关键词
D O I
10.1063/1.345454
中图分类号
O59 [应用物理学];
学科分类号
摘要
Modeling of rough step edges has been made and compared with scanning tunneling microscopy (STM) micrographs. In this paper, we use a phenomenological Hamiltonian to calculate diffraction profiles which can be used to determine the extent of step-edge meandering. Comparison with experiment is made based on a parametrization of the step statistics obtained from STM data of silicon (001) step edges.
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页码:2848 / 2852
页数:5
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