MICROTRANSPORT INDUCED BY ULTRASONIC LAMB WAVES

被引:129
作者
MORONEY, RM [1 ]
WHITE, RM [1 ]
HOWE, RT [1 ]
机构
[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
关键词
D O I
10.1063/1.105339
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have observed pumping of water induced by 4.7 MHz ultrasonic Lamb waves traveling in a 4-mu-m-thick composite membrane of silicon nitride and piezoelectric zinc oxide. The observed pumping speed is proportional to the square of the wave amplitude; the speed was 100-mu-m/s for a rf drive voltage of 8 V and a 6.5 nm wave amplitude. A nonlinear model based on acoustic streaming theory predicts velocities in good agreement with experiment.
引用
收藏
页码:774 / 776
页数:3
相关论文
共 13 条
[1]  
[Anonymous], 1967, RAYLEIGH LAMB WAVES
[2]   SCATTERING OF LIGHT REFLECTED FROM ACOUSTIC SURFACE WAVES IN ISOTROPIC SOLIDS [J].
AUTH, DC ;
MAYER, WG .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) :5138-&
[3]   SILICON MICROMECHANICS - SENSORS AND ACTUATORS ON A CHIP [J].
HOWE, RT ;
MULLER, RS ;
GABRIEL, KJ ;
TRIMMER, WSN .
IEEE SPECTRUM, 1990, 27 (07) :29-&
[5]  
Moroney R., 1990, P IEEE ULTR S, P355
[6]  
Moroney R. M., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P277, DOI 10.1109/MEMSYS.1991.114810
[7]  
Moroney R. M., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P182, DOI 10.1109/MEMSYS.1990.110273
[8]  
MORONEY RM, 1989, P IEEE ULTR S MONTR, P745
[9]  
NYBORG WL, 1965, PHYSICAL ACOUSTICS A, pCH11
[10]  
UEHA S, 1989, P 1989 IEEE ULTR S, P749