TEMPERATURE-DEPENDENT FORMATION OF MICROCRYSTAL AND AMORPHOUS-SILICON BY VACUUM EVAPORATION

被引:10
作者
FANG, PH
BAI, PG
KINNIER, JH
HUAN, Z
SCHUBERT, CC
机构
关键词
D O I
10.1016/0022-3093(83)90296-X
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:819 / 821
页数:3
相关论文
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UCHIDA Y, 1982, JPN J APPL PHYS, V21, P586