A SEARCH FOR A THERMAL SPIKE EFFECT IN SPUTTERING .1. TEMPERATURE-DEPENDENCE OF THE YIELD AT LOW-KEV, HEAVY-ION BOMBARDMENT

被引：60

作者：

BESOCKE, K

BERGER, S

HOFER, WO

LITTMARK, U

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 66卷 / 1-2期

关键词：

D O I：

10.1080/00337578208211472

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：35 / 41

页数：7

共 20 条

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[7]

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[8]

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[9]

HOFER WO, 1979, 8TH P INT C AT COLL, P275

[10]

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