共 35 条
[2]
AUKERMAN LW, 1963, J APPL PHYS, V34, P3540
[3]
LOW-SYMMETRY INTERSTITIAL BORON CENTER IN IRRADIATED GALLIUM-ARSENIDE
[J].
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS,
1978, 11 (15)
:3135-3146
[5]
DEARNALEY G, 1973, ION IMPLANTATION, P28
[8]
GARMIRE E, 1982, APPL PHYS LETT, V21, P87
[9]
ION IMPLANTATION IN SEMICONDUCTORS .2. DAMAGE PRODUCTION AND ANNEALING
[J].
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS,
1972, 60 (09)
:1062-&
[10]
GIBBONS JF, 1975, PROJECTED RANGE STAT