VISIBLE LASER-LIGHT IN PHOTOINDUCED POLYMERIZATION .1. A QUANTITATIVE COMPARISON WITH UV LASER IRRADIATION

被引：12

作者：

FOUASSIER, JP

LOUGNOT, DJ

PILOT, T

机构：

来源：

关键词：

D O I：

10.1002/pol.1985.170230229

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：569 / 573

页数：5

共 11 条

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[3] BUBROENCQ GM, 1982, P S MICROLITHOGRAPHY
[4] COLLINS GL, 1979, J COAT TECHN, V51, P648
[5] DECKER C, 1983, RAD CUR, V83, P265
[6] DEGENNES PG, 1971, J CHEM PHYS, V55, P571
[7] FAURE J, 1977, NOUV J CHIM, V1, P15
[8] IMPROVEMENT OF PHOTO-POLYMER REACTIVITY - A FUNDAMENTAL APPROACH
FOUASSIER, JP
[J]. JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1983, 80 (04) : 339 - 353
[9] FOUASSIER JP, 1983, MAKROMOL CHEM, V4, P11
[10] ULTRAFAST HIGH-RESOLUTION CONTACT LITHOGRAPHY WITH EXCIMER LASERS
JAIN, K
WILLSON, CG
LIN, BJ
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (02) : 151 - 159