SURFACE-MORPHOLOGY OF CUBIC SIC(100) GROWN ON SI(100) BY CHEMICAL VAPOR-DEPOSITION

被引：107

作者：

SHIBAHARA, K ^{[1
]}

NISHINO, S ^{[1
]}

MATSUNAMI, H ^{[1
]}

机构：

[1] KYOTO INST TECHNOL,COLL TECH,DEPT ELECT ENGN,KYOTO 606,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 78卷 / 03期

关键词：

D O I：

10.1016/0022-0248(86)90158-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：538 / 544

页数：7

共 17 条

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