ENERGETIC CLUSTER IMPACTS ON THIN GOLD AND TANTALUM FILMS

被引：26

作者：

MATTHEW, MW

BEUHLER, RJ

LEDBETTER, M

FRIEDMAN, L

机构：

[1] BROOKHAVEN NATL LAB,DEPT CHEM,UPTON,NY 11973

[2] BROOKHAVEN NATL LAB,DEPT BIOL,UPTON,NY 11973

来源：

关键词：

D O I：

10.1021/j100405a023

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：3152 / 3159

页数：8

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