DIFFERENTIAL REFLECTOMETRY OF THIN-FILM METAL-OXIDES ON COPPER, TUNGSTEN, MOLYBDENUM AND CHROMIUM

被引:5
作者
URBAN, FK
HUMMEL, RE
VERINK, ED
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D O I
10.1016/0010-938X(82)90045-2
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T [工业技术];
学科分类号
08 ;
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页码:647 / 660
页数:14
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