MONOLITHIC GONIOMETER FOR PURE ROTATION AND FINE ORIENTATION CONTROL

被引：4

作者：

TANAKA, M

NAKAYAMA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 06期

关键词：

D O I：

10.1143/JJAP.21.955

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：955 / 956

页数：2

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[4]

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[5] PIEZODRIVEN 50-MUM RANGE STAGE WITH SUB-NANOMETER RESOLUTION [J].

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[6]

TANAKA M, 1981, OYO BUTURI, V50, P2

[7]

1956, 15 NAT PHYS LAB NOT