ETCHING OF GAN USING PHOSPHORIC-ACID

被引：54

作者：

SHINTANI, A ^{[1
]}

MINAGAWA, S ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI 185,TOKYO 185,JAPAN

来源：

关键词：

D O I：

10.1149/1.2132914

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：706 / 713

页数：8

共 25 条

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