STRUCTURE AND ELECTRICAL-PROPERTIES OF PZT THICK-FILMS PRODUCED BY PLASMA SPRAYING

被引:22
作者
HAESSLER, W
THIELSCH, R
MATTERN, N
机构
[1] IFW Dresden e.V.
关键词
D O I
10.1016/0167-577X(95)00123-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ferroelectric Pb(ZrxTil-x)O-3 films with x=0.50-0.66 were deposited by plasma spraying. The influence of deposition conditions (composition and particle size of the powder, plasma power, spray distance) as well as of post-deposition annealing on the structural and electrical properties, especially dielectric constant and hysteresis loop, were studied. Main problems arise from the incongruent melting of the PZT during deposition.
引用
收藏
页码:387 / 391
页数:5
相关论文
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