In-situ sputter deposition of PT and PZT films on platinum and RuO2 electrodes

被引：15

作者：

Maeder, T

Muralt, P

Sagalowicz, L

Setter, N

机构：

[1] Laboratoire de Céramique, Ecole Polytechnique Fédérale de Lausanne

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00139-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The in-situ growth of PbZrxTi1-xO3 (PZT) and PbTiO3 (PT) thin films by reactive sputter deposition has been investigated for applications with silicon substrates. In-situ deposition from three simultaneously operating magnetron sources was applied. At the selected growth temperature range (550-600 degrees C), self-stabilisation of lead composition by a lar ge desorption rate of Pb on stoichiometric PZT surfaces has been observed. Interlayer mixing was found to be limited to a few monolayers. Both Pt and RuO2 on Si-SiO2 wafers were used as top and bottom electrodes. The type of bottom electrode, together with the lead flux and the presence of a bottom PT layer to help nucleate the growth of PZT, was found to have a marked influence on the crystallisation behaviour of the PZT films. Dielectric characterisation has been performed on the films, and the dependence on the deposition parameters is discussed.

引用

页码：177 / 180

页数：4

共 13 条

[1]

Larsen, Cuppens, Spierings, Ferroelectric memories, Ferroelectrics, 128, 1-4, (1992)

[2]

Larsen, Cuppens, Spierings, Ferroelectrics, 128, 1-4, pp. 265-292, (1992)

[3]

Racine, Luthier, de Rooj, Micro Electro Mechanical Systems, (1993)

[4]

Brooks, Damjanovic, Kholkin, Reaney, Setter, Luginbuhl, Racine, de Rooij, Saaman, Integrated Ferroelectrics, (1994)

[5]

Auciello, Gifford, Kingon, Appl. Phys. Lett., 64, 21, pp. 2873-2875, (1994)

[6]

Spierings, Uleneaers, Kampschoer, Hal, Larsen, J. Appl. Phys., 70, 4, pp. 2290-2298, (1991)

[7]

Dexter, Lewis, Chadney, TfP259. Growth of PLZT thin films using cluster magnetron techniques, Ferroelectrics, 134, pp. 349-354, (1992)

[8]

Dormans, de Kejser, Veldhoven, Frigo, Holewijn, Mie, Smit, Chem. Mater., 5, pp. 448-451, (1993)

[9]

Bruchhaus, Huber, Pitzer, Wersing, Deposition of ferroelectric PZT thin films by planar multi-target sputtering, Ferroelectrics, 127, pp. 137-142, (1992)

[10]

Maeder, Muralt, Kohli, Kholkin, Setter, Ceramic films and coatings, (1994)

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