OBSERVATION OF CONTACT HOLES BY ATOMIC-FORCE MICROSCOPY WITH A ZNO WHISKER TIP

被引：23

作者：

KADO, H ^{[1
]}

YAMAMOTO, S ^{[1
]}

YOKOYAMA, K ^{[1
]}

TOHDA, T ^{[1
]}

UMETANI, Y ^{[1
]}

机构：

[1] MATSUSHITA TECHNORES INC,MORIGUCHI,OSAKA 570,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 07期

关键词：

D O I：

10.1063/1.355313

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a new precise imaging technique for atomic force microscopy (AFM) and observed complicated surface structures of integrated circuit (IC) devices by this technique. This technique consists of a hopping mode operation and use of a zinc oxide whisker as a probing tip with high aspect ratio, In this operation, topographic data of the surface structures are obtained under a constant repulsive force at each measuring point, and after each measurement the probing tip is withdrawn from the surface and moved to the next measuring point. The contact holes with a diameter of approximately 1 mum and a depth of 1.5 mum fabricated on IC devices have been successfully imaged in this AFM imaging technique.

引用

页码：4354 / 4356

页数：3

共 15 条

[1] IMPROVED ATOMIC FORCE MICROSCOPE IMAGES USING MICROCANTILEVERS WITH SHARP TIPS [J].