SOLUTION DEPOSITION OF THIN SOLID COMPOUND FILMS BY A SUCCESSIVE IONIC-LAYER ADSORPTION AND REACTION PROCESS

被引：407

作者：

NICOLAU, YF

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APPLICATIONS OF SURFACE SCIENCE | 1985年 / 22-3卷 / MAY期

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10.1016/0378-5963(85)90241-7

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页码：1061 / 1074

页数：14

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